The 38th International Conference of Photopolymer Science and Technology
2021年6月15日〜7月14日オンライン開催
The 38th International Conference of Photopolymer Science and Technology
2021年6月15日〜7月14日オンライン開催
[A-45]The Measurement of the Refractive Index n and k Value of the EUV Resist by EUV Reflectivity Measurement Method
Yosuke Ohta (1), Jun Sekiguchi (1), Shota Niihara (2), Tetsuo Harada (2), Takeo Watanabe (2)((1) Litho Tech Japan, (2) University of Hyogo)