The 38th International Conference of Photopolymer Science and Technology

The 38th International Conference of Photopolymer Science and Technology

2021年6月15日〜7月14日オンライン開催
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The 38th International Conference of Photopolymer Science and Technology
The 38th International Conference of Photopolymer Science and Technology

The 38th International Conference of Photopolymer Science and Technology

2021年6月15日〜7月14日オンライン開催

[A-84]Polymerizable Olefins Groups in Antimony EUV Photoresists

Michael Murphy, Nitinkumar S. Upadhyay, Munsaf Ali, James Passarelli, Jodi
Grzeskowiak, Maximillian Weires, Robert L. Brainard(State University of New York, Polytechnic Institute)
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