講演情報

[223]酸素ドーパントによるCrN薄膜のP-N変換

*双 逸1、須藤 祐司1,2 (1. 東北大AIMR、2. 東北大工)

キーワード:

CrN、Thermoelectric material、Thin film

In this study, a p-type CrN thermoelectric thin film was successfully fabricated by using a simple sputtering method.