[16p-P04-1~1] 8.6 Plasma Electronics English Session

英語発表

[16p-P04-1] 【Absent】A Novel Design Method of Impedance Converting Network for Multi-level/High Frequency Pulse Power Supply

〇Lee Jaejoong¹, Yongwon Cho¹, Younghwan Choi¹, Hwasoo Seok¹, Meehyun Lim¹, Sungyeol Kim¹ (1.MR, SAMSUNG)

キーワード：

Impedance Compression Network、Matchless、Inductive Plasma Chamber

We present a new matching network design method for high-speed RF power modulation in plasma systems. Based on the previously introduced impedance compression network concept, this approach improves the shortcomings of the existing methodology by expanding the matching area through a new design methodology and improving it to applicable level for Fab facilities. In addition, this paper introduces an algorithm for controlling plasma based on the new concept ICN design, and its feasibility is confirmed through simulation and experimental results in actual plasma chambers under various gas conditions. It can be applied to various RF frequencies for plasma control, and it is expected that this technology will contribute to the next-generation device process with the acceleration of introducing high-speed RF modulation technology.