講演情報
[18p-A25-15]Precision microprocessing of silica glass using a temporally shaped ultrafast laser
〇Guoqi Ren1, Huijie Sun1, Keiichi Nakagawa1, Naohiko Sugita1, Yusuke Ito1 (1.Univ. Tokyo)
キーワード：
Ultrafast laser、Micro processing、Pulse shaping
Owing to the extremely high intensity and the small heat-affected zone, ultrafast lasers have been widely used for the microprocessing of transparent hard and brittle materials. However, the great pressure applied on the base materials during the fast expansion of plasma results in severe cracks in the processing regions, which degrades the precision and makes the application limited. In recent years, several methos have been demonstrated to improve processing precision, including the GHz burst mode, transient and selective laser processing method, and liquid-assisted processing. Nevertheless, these methods have either expensive equipment or complicated setups. In this work, we achieve crackless precision processing through temporally shaping an ultrafast laser. An ultrafast laser having a pulse duration of 5 ps is split into two sub pulses (P1 and P2). P1 is directly delivered into the silica glass sample for electron excitation. P2 is temporally stretched to ~300 ps using a chirped volume Bragg grating, and then used to heat the electrons and achieve the material removal. By using the proposed method, the cracks are almost inhibited. Moreover, the hole depth increases more than 3.3 times, and the aspect-ratio is improved at least 2.2 times. This method provides a new route for the precise processing.
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