[18p-C31-1~19] 12.7 医用工学・バイオチップ

17:45 〜 18:00英語発表

[18p-C31-17] Hydrophobic Filters Based on PDMS and Zeolite Hybrid Membrane for Pre-separation of Gas Detection

〇Chuanlai Zang¹, Hiroyasu Yamahara¹, Hitoshi Tabata¹ (1.Tokyo Univ.)

キーワード：

gas sensor

In this study, the single nanowire gas sensor array was fabricated by electron beam lithography. Then, the PDMS and zeolites hybrid hydrophobic filter was spin-coating over the gas sensor array. Due to their porous structure, the individual use of zeolites leads to easy adsorption of water vapor. On the other hand, PDMS coatings, while providing excellent moisture resistance, can impede the penetration of gases to the sensing material. Our experimental results indicate that mixed coatings of PDMS and zeolites effectively improve humidity resistance while allowing selective gas filtration through the zeolite pores. The PDMS layer also provides stability, enhancing the reliability of oxide gas sensors over prolonged use. The thickness effect of the hybrid membrane and pore size filter performance was studied quantitively. The simple combination of PDMS and porous materials as a coating method can be broadly applied to oxide gas sensors to improve their humidity resistance.