[19a-A35-1~11] 3.12 半導体光デバイス

10:15 〜 10:30英語発表

[19a-A35-6] Efficient Fabrication Method of Micro-Pyramid Structures for High-Speed Imaging

〇Sota Oshima¹ (1.Ritsumei Univ.)

キーワード：

optical device、photodiode、image sensor

Ge in Si concave pyramid structure is proposed to achieve higher temporal resolution, for example 10.1 ps for NIR light. In this study, we propose fabrication method of the Si concave pyramid structures with SiO2 film on the sidewalls without SiO2 patterning process. It allows not only reduction of process steps during fabrication but high-precision pyramid structure.