[19p-P06-1~50] 10 スピントロニクス・マグネティクス（ポスター）

英語発表

[19p-P06-29] Effect of hydrogen annealing in CoFeB/MgO system

〇(M1)Noriyuki Seki¹, Toshiaki Morita¹, Daichi Chiba^1,2,3,4, Tomohiro Koyama^1,2,3,5 (1.SANKEN, Osaka Univ., 2.CSRN, Osaka Univ., 3.OTRI, Osaka Univ., 4.SRIS, Tohoku Univ., 5.JST PRESTO)

キーワード：

hydrogen、CoFeB/MgO

Magnetic tunnel junctions based on the CoFeB/MgO structure are known to exhibit a high tunnel magnetoresistance ratio. Furthermore, in this structure, a strong perpendicular magnetic anisotropy can be obtained by making the CoFeB layer thin due to the interfacial magnetic anisotropy at the CoFeB/MgO interface. To obtain these properties, the system needs to be annealed, which is generally performed in a high vacuum. In this study, we investigate how the magnetic properties of the CoFeB/MgO system affected when the annealing is conducted under hydrogen gas atmosphere.