講演情報
[10a-PA4-21]Low temperature diamond growth in a microwave chemical vapor deposition system.
〇David VazquezCortes1, Stoffel D. Janssens1, Eliot Fried1 (1.OIST)
キーワード：
nanocrystalline diamond、microwave chemical vapor deposition、low temperature
In this work, we designed a sample holder with high thermal conductance between the holder and the water-cooled stage on which it is mounted. Heat transfer was enhanced by increasing the contact area between the holder and the stage. Using these holders, diamond growth at temperatures close to room temperature was achieved. Diamond growth was monitored in situ by laser reflectance measurements during deposition, and the diamond phase was confirmed by Raman spectroscopy.