講演情報
[9p-E207-11]Effect of Humidity on the Actuation Behavior of PEDOT:PSS 3-D Suspended Actuators Directly Fabricated by Electron Beam Lithography
〇(D)Yandong Yang1, Shin'ichi Warisawa1, Reo Kometani1 (1.The Univ. of Tokyo)
キーワード：
PEDOT:PSS、Electron beam lithography、Actuator
PEDOT:PSS-based soft actuators are strongly influenced by water absorption/desorption. Here, we clarify the humidity-dependent actuation of EBL-fabricated PEDOT:PSS 3-D suspended actuators. PH1000 films (~2.35 μm) were prepared on SiO2 substrates with Cr/Au electrodes. The support regions were exposed at 20 kV and 100 μC/cm2, while the suspended actuator regions were exposed at 5 kV and 25, 65, or 280 μC/cm2, followed by development in DI water and IPA rinse. Actuation was measured at 30, 45, 55, and 65% RH. For the 65 μC/cm2 actuator, the contraction ratio increased monotonically with current, and the current–contraction curves shifted upward at higher RH, indicating enhanced water-assisted deformation. Both the contraction ratio at 99% recovery and the maximum contraction before failure also increased with RH. Similar trends were observed for the 25 and 280 μC/cm2 devices, demonstrating that ambient humidity is a key parameter governing the actuation performance of EBL-fabricated PEDOT:PSS suspended actuators.