講演情報
[PE1-070]Study on the Fabrication of μ-MIM Pattern Mold by UV-lithography and Electroforming Process
○Sung Cheol Park1, Seong Ho Son1, Ho-Nyun Lee1, Wonsik Lee1, Yong-Dae Kim1, Jin Yeon Lee1 (1. Korea Institute Industrial Technology)
Micro Metal injection molding (µ-MIM) is suitable to produce complex and precision-shaped parts from a variety of materials. The molds for µ-MIM need higher hardness and dimensional accuracy. Recently, MEMS(Microelectromechanical systems) technology has been widely used in fabrication of micro molds with high aspect ratio. Electroforming process is one of the most useful fabrication techniques, which is suitable for the fabrication of complex-shaped product. In this study, the µ-MIM molds was fabricated by electroforming process of Ni-Fe alloys using lithography process. 500 µm thick sheets of SUEX were laminated on highly-doped 4-inch silicon wafers. The mandrel with width of 190 μm and spacing of 140 μm was prepared. Iron component in Ni-Fe electrodeposits was almost consistent in the range of 20%-30% with the increase of current density from 2 to 4 A/dm2. The line pattern molds of Ni-Fe alloy were electroformed successfully.