講演情報
[ME1-2]A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss
〇Philippe Helin, Andrea Firrincieli, Ashesh Ray Chaudhuri, Nga Pham, Silvia Lenci, Manuel Mannarino, Haris Osman (Imec, Belgium)
This paper reports state-of-the-art values for a 200mm LPCVD silicon nitride platform in terms of layer thickness control; 1nm for a silicon nitride thickness of 400nm with low propagation loss 0.13dB/cm at 1520nm.