1969 Conference on Solid State Devices

1969 Conference on Solid State Devices

1969年9月26日〜9月27日Sankei Hall, Tokyo, Japan
International Conference on Solid State Devices and Materials
1969 Conference on Solid State Devices

1969 Conference on Solid State Devices

1969年9月26日〜9月27日Sankei Hall, Tokyo, Japan

[3-4]Defects In Silicon Generated Ion Implantation

T. Tsuchimoto、T. Ikeda、T. Tokuyama(1.Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1969.3-4