1970 Conference on Solid State Devices

1970 Conference on Solid State Devices

1970年9月21日〜9月22日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1970 Conference on Solid State Devices

1970 Conference on Solid State Devices

1970年9月21日〜9月22日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[6-3]Surface Electron Mobility of Silicon MISFETs with Various Gate Insulator Structures

I. Yoshida、T. Miyazaki、Y. Katayama、N. Kotera(1.Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1970.6-3
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