1972 Conference on Solid State Devices

1972 Conference on Solid State Devices

1972年8月30日〜8月31日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1972 Conference on Solid State Devices

1972 Conference on Solid State Devices

1972年8月30日〜8月31日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[4-3]Study on Three-Dimensional Distribution of Implanted Ions by He+ Backscattering Technique

Hiroshi ISHIWARA、Seijiro FURUKAWA、Hideki MATSUMURA、Nobuyoshi NATSUAKI(1.Department of Physical Electronics, Faculty of Engineering Tokyo Institute of Technology)
https://doi.org/10.7567/SSDM.1972.4-3
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