1973 International Conference on Solid State Devices

1973 International Conference on Solid State Devices

1973年8月29日〜8月31日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1973 International Conference on Solid State Devices

1973 International Conference on Solid State Devices

1973年8月29日〜8月31日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[2-2]ANALITICAL CALCULATION OF THE VACANCY DISTRIBUTION AND THE SEMICONDUCTOR AMORPHIZATION DOSE DURING ION IMPLANTATION

V. V. YUDIN(1.Ministry of Electronic Industry)
https://doi.org/10.7567/SSDM.1973.2-2
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