1978 Conference on Solid State Devices

1978 Conference on Solid State Devices

1978年8月29日〜8月30日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1978 Conference on Solid State Devices

1978 Conference on Solid State Devices

1978年8月29日〜8月30日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-5-2]Deep Levels Introduced by Iron Implantation in N-Type Silicon and Its Application to Switching Devices

H. Hayashi、T. Mamine、T. Matsushita、O. Kumagai、K. Nishiyama、K. Kaneko(1.SONY Corporation Semiconductor Development Division and Research Center)
https://doi.org/10.7567/SSDM.1978.A-5-2
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