1978 Conference on Solid State Devices

1978 Conference on Solid State Devices

1978年8月29日〜8月30日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1978 Conference on Solid State Devices

1978 Conference on Solid State Devices

1978年8月29日〜8月30日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-6-4]MOS LSI Fabrication Process Using Direct Electron Beam Writing

Y. Sakakibara、E. Arai、H. Yoshino、T. Kobayashi、H. Akiya、K. Hirata(1.Musashino Electrical Communication Laboratory, NTT)
https://doi.org/10.7567/SSDM.1978.A-6-4
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