1978 Conference on Solid State Devices

1978 Conference on Solid State Devices

1978年8月29日〜8月30日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1978 Conference on Solid State Devices

1978 Conference on Solid State Devices

1978年8月29日〜8月30日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-3-4]STACKING FAULTS FROM OXIDE PRECIPITATES IN CZ SILICON

Hidetoshi Takaoka、Jiro Oosaka、Naohisa Inoue(1.Musashino Electrical Communication Laboratory, NTT)
https://doi.org/10.7567/SSDM.1978.B-3-4
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