1979 International Conference on Solid State Devices

1979 International Conference on Solid State Devices

1979年8月27日〜8月29日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1979 International Conference on Solid State Devices

1979 International Conference on Solid State Devices

1979年8月27日〜8月29日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-1-5]Electron Beam Mask Fabrication for MOSLSI's with 1 μm - 1.5 μm Design Rules

Shinji Okazaki、Kozo Mochiji、Eiji Takeda、Yoji Maruyama、Shojiro Asai(1.Central Research Laboratory、2.Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1979.A-1-5
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