1979 International Conference on Solid State Devices

1979 International Conference on Solid State Devices

1979年8月27日〜8月29日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1979 International Conference on Solid State Devices

1979 International Conference on Solid State Devices

1979年8月27日〜8月29日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-2-6]Anodization of Silicon in RF induced Oxygen Plasma

Ho Quoc VU、Takuo SUGANO(1.Department of Electronic Engineering、2.the University of Tokyo)
https://doi.org/10.7567/SSDM.1979.A-2-6
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