1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

1980年8月26日〜8月27日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

1980年8月26日〜8月27日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-1-2]BOW AND WARPAGE OF SILICON WAFERS

Shin. Takasu、H. Otsuka、N. Yoshihiro、T. Oku、M. Ishida(1.VLSI Cooperative Laboratories)
https://doi.org/10.7567/SSDM.1980.A-1-2
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