1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

1980年8月26日〜8月27日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

1980年8月26日〜8月27日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-3]Custom LSI Process with a Micron Geometry, Partially Using Electron Beam Direct Writing

N. Endo、Y. Kurogi、K. Suzuki、M. Sugimoto、M. Morimoto、Y. Iida、K. Mori(1.Central Research Laboratories, Nippon Electric Co., Ltd.)
https://doi.org/10.7567/SSDM.1980.A-4-3
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