1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

1980年8月26日〜8月27日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
戻る
International Conference on Solid State Devices and Materials
1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

1980年8月26日〜8月27日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-4-3]Novel Deposition Technique of a-Si:H -- Silane Glow Discharge in Magnetic Field --

T. Hamasaki、M. Hirose、H. Kurata、M. Taniguchi、Y. Osaka(1.Department of Electrical Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1980.B-4-3
PDFダウンロードPDFダウンロード
戻る