1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

1981年8月26日〜8月27日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

1981年8月26日〜8月27日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-3-1]Microdefects in Czochralski-Grown Silicon Crystals and Their Application to Gettering Technique

Seigo Kishino(1.Musashi Works of Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1981.A-3-1
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