1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

1981年8月26日〜8月27日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1981 Conference on Solid State Devices

1981 Conference on Solid State Devices

1981年8月26日〜8月27日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-8]Trapped Ar Induced Deformation of Magnetron Sputtered Al Film Overlaid with Plasma SiN Film

H. Harada、H. Yakushiji、T. Nishioka、H. Kotani、Y. Hirata(1.LSI Research and Development Laboratory, Mitsubishi Electric Corporation Computer Development Laboratories Limited)
https://doi.org/10.7567/SSDM.1981.A-4-8
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