1983 Conference on Solid State Devices and Materials

1983 Conference on Solid State Devices and Materials

1983年8月30日〜9月1日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
戻る
International Conference on Solid State Devices and Materials
1983 Conference on Solid State Devices and Materials

1983 Conference on Solid State Devices and Materials

1983年8月30日〜9月1日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-2-3]Formation of Si Epi./MgO･Al2O3 Epi./SiO2/Si and Its Epitaxial Film Quality

Masao Mikami、Yasuaki Hokari、Koji Egami、Hideki Tsuya、Masaru Kanamori(1.Fundamental Research Laboratories and Microelectronics Laboratories, NEC Corporation)
https://doi.org/10.7567/SSDM.1983.A-2-3
PDFダウンロードPDFダウンロード
戻る