1983 Conference on Solid State Devices and Materials

1983 Conference on Solid State Devices and Materials

1983年8月30日〜9月1日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1983 Conference on Solid State Devices and Materials

1983 Conference on Solid State Devices and Materials

1983年8月30日〜9月1日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-3-9]Local Modes from Si at Gallium and Arsenic Sites and Electrical Activation in Implanted GaAs

T. Nakamura、T. Katoda(1.Institute of Interdisciplinary Research Faculty of Engineering, The University of Tokyo)
https://doi.org/10.7567/SSDM.1983.B-3-9
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