[B-2-3]Elimination of Emitter-Mesa Etching and Complete Planarization of Heterojunction Bipolar Transistors via Doping Selective Base Contact and Selective Hole Epitaxy
T. Y. Kuo、K. W. Goossen、J. E. Cunningham、C. G. Fonstad、F. Ren、W. Jan(1.AT&T Bell Laboratories、2.Massachusetts Institute of Technology)
