1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

1990年8月22日〜8月24日Hotel Sendai Plaza, Sendai, Japan
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International Conference on Solid State Devices and Materials
1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

1990年8月22日〜8月24日Hotel Sendai Plaza, Sendai, Japan

[B-3-3]Application of Hydrogenation to Improve GaAs/Si MESFETs and IC Performance by PECVD SiN

Mingxiang Li、Qingyi Tong、Gang Zou、J. Deboeck、M. Von Rossum、G.J. Declerck(1.Microelectronics Center, Southeast University、2.IMEC)
https://doi.org/10.7567/SSDM.1990.B-3-3
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