1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

1990年8月22日〜8月24日Hotel Sendai Plaza, Sendai, Japan
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International Conference on Solid State Devices and Materials
1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

1990年8月22日〜8月24日Hotel Sendai Plaza, Sendai, Japan

[C-2-2]Modification of the SiO2-Si System by Treatment in Atomic Hydrogen and Very Light Nitridation

I. A. Aizenberg(1.Academy of Sciences, U.S.S.R.)
https://doi.org/10.7567/SSDM.1990.C-2-2
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