1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

1990年8月22日〜8月24日Hotel Sendai Plaza, Sendai, Japan
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International Conference on Solid State Devices and Materials
1990 International Conference on Solid State Devices and Materials

1990 International Conference on Solid State Devices and Materials

1990年8月22日〜8月24日Hotel Sendai Plaza, Sendai, Japan

[C-2-9]High Reliability Poly-Oxide Grown on in-situ Phosphorus Doped Amorphous Si

Takashi KOBAYASHI、Shinpei IIJIMA、Atsushi HIRAIWA(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1990.C-2-9
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