1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan

[A-1-3]High-Performance Buried-Gate MOSFETs with RTO-Grown Ultrathin Gate Oxide Films

Hisashi FUKUDA、Tomiyuki ARAKAWA、Toshiyuki OCHIAI Takahisa HAYASHI、Toshiyuki IWABUCHI(1.Semiconductor Tech. Lab., Oki Electric Industry Co., Ltd.)
https://doi.org/10.7567/SSDM.1993.A-1-3
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