1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan

[D-1-2]Si Grain-Free Highly Conductive Microcrystalline SiC Films Prepared by Using Organic Silane Gas

K. Sasaki、T. Miyajima、H. Hosoya、S. Furukawa(1.Interdisciplinary Graduate School of Science and Engineering Tokyo Institute of Technology)
https://doi.org/10.7567/SSDM.1993.D-1-2
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