1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan

[S-II-2]Selective Etching of Native Oxide Using Vapor HF Processing

J. M. de Larios、J. O. Borland、S. Hatada、I. Tamatani(1.Genus, Inc., Thin Film Division、2.Sumitomo Metal Industries, Ltd., Semiconductor Equipment Div.)
https://doi.org/10.7567/SSDM.1993.S-II-2
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