1993 International Conference on Solid State Devices and Materials
1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan
1993 International Conference on Solid State Devices and Materials
1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan
[S-II-4]Correlation between Chemical Structure and Electrical Properties of NH3-Nitrided N2O Oxides
M. Bhat、G. W. Yoon、A. B. Joshi、J. Kim、J. Ahn、D. L. Kwong、M. Arendt、J. M. White(1.Microelectronics Research Center, Department of Electrical and Computer Engineering The University of Texas、2.Department of Chemistry The University of Texas)
