1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan

[S-III-1]In-Situ Transmission Electron Microscopy Study of Roughness during Silicon Oxidation and Silicidation

J. M. GIBSON、X. TONG、R. D. TWESTEN、F. M. ROSS(1.University of Illinois, Department of Physics、2.Lawrence Berkeley Laboratories)
https://doi.org/10.7567/SSDM.1993.S-III-1
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