1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan

[S-III-5]Local Ordering and Layer by Layer Growth of the Initial Thermal Oxide of Si(001)

Masaharu UDAGAWA、Masaaki NIWA、Isao SUMITA(1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.、2.Matsushita Research Institute Tokyo, Inc.)
https://doi.org/10.7567/SSDM.1993.S-III-5
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