1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan
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International Conference on Solid State Devices and Materials
1993 International Conference on Solid State Devices and Materials

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜9月1日Makuhari Messe, Chiba, Japan

[S-III-9]Native Oxides on Si-Surfaces of Deep-Submicron Contact-Hole-Bottoms

N. Aoto、M. Nakamori、H. Hada、T. Kunio、E. Ikawa(1.ULSI Device Development Laboratories, Microelectronics Research Laboratories NEC Corporation)
https://doi.org/10.7567/SSDM.1993.S-III-9
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