2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜9月18日Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan
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International Conference on Solid State Devices and Materials
2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜9月18日Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[A-1-3]New Self-aligned Metal-gate MOSFETs Using Aluminum Substitution Technology

S. Nakamura、H. Shido、T. Kurahashi、S. Kishii、T. Nagata、B. Kumasaka、T. Usuki、S. Sato、Y. Mishima(1.Fujitsu Laboratories Ltd.)
https://doi.org/10.7567/SSDM.2003.A-1-3
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