2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜9月18日Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan
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International Conference on Solid State Devices and Materials
2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜9月18日Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[A-9-2]Channel direction impact of (110) surface Si substrate on performance improvement in sub-100 nm MOSFETs

Hidetatsu Nakamura、Tatsuya Ezaki、Toshiyuki Iwamoto、Mitsuhiro Togo、Nobuyuki Ikarashi、Masami Hane、Toyoji Yamamoto(1.Silicon Systems Research Labs., NEC Corporation)
https://doi.org/10.7567/SSDM.2003.A-9-2
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