2006 International Conference on Solid State Devices and Materials
2006年9月12日〜9月15日PACIFICO Yokohama, Yokohama, Japan
2006 International Conference on Solid State Devices and Materials
2006年9月12日〜9月15日PACIFICO Yokohama, Yokohama, Japan
[A-1-3]High-Resolution Measurement of Ultra-Shallow Structures by Scanning Spreading Resistance Microscopy
Li Zhang、Kazuya Ohuchi、Kanna Adachi、Mitsuhiro Tomita、Kazunari Ishimaru、Mariko Takayanagi、Akira Nishiyama(1.Advanced LSI Technology Laboratory, Corporate Research & Development Center, Toshiba Corporation、2.Center For Semiconductor Research & Development, Toshiba Corporation Semiconductor Company)
