2006 International Conference on Solid State Devices and Materials

2006 International Conference on Solid State Devices and Materials

2006年9月12日〜9月15日PACIFICO Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
2006 International Conference on Solid State Devices and Materials

2006 International Conference on Solid State Devices and Materials

2006年9月12日〜9月15日PACIFICO Yokohama, Yokohama, Japan

[A-3-4]Room Temperature Vacuum Sealing with Au Thin Films Using Ar Beam Surface Activation

Hironao Okada、Toshihiro Itoh、Tadatomo Suga(1.Univ. of Tokyo, Dept. of Precision Eng, School of Eng.)
https://doi.org/10.7567/SSDM.2006.A-3-4
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