2007 International Conference on Solid State Devices and Materials
2007年9月18日〜9月21日Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
2007 International Conference on Solid State Devices and Materials
2007年9月18日〜9月21日Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-2-5]Thermally Robust Germanium MIS Gate Stacks with LaYO3 Dielectric Film
Toshitake Takahashi、Yi Zhao、Tomonori Nishimura、Koji Kita、Akira Toriumi(1.Department of Materials Engineering, School of Engineering, The University of Tokyo)
