[A-3-1]A Study of NBTI and PBTI (Charge Trapping) in High k Stacks with NiSi, TiN, Re Gates
S. Zafar、Y. H. Kim、V. Paruchuri、V. Narayanan、B. Doris、A. Callegari、J. Stathis、T. Ning(1.IBM Semiconductor Research & Development Center (SRDC), Research Division)
