2007 International Conference on Solid State Devices and Materials
2007年9月18日〜9月21日Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
2007 International Conference on Solid State Devices and Materials
2007年9月18日〜9月21日Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-7-4]Systematic studies on Fermi level pining of Hf-based high-k gate stacks
K. Shiraishi、Y. Akasaka、G. Nakamura、M. Kadoshima、H. Watanabe、K. Ohmori、T. Chikyow、K. Yamabe、Y. Nara、Y. Ohji、K. Yamada(1.Graduate School of Pure and Applied Sciences, Univ. of Tsukuba、2.CREST, Japan Science and Technology Agency、3.Semiconductor Leading Edge Technology Inc.、4.Graduate School of Engineering, Osaka University、5.Nanotechnology Research Laboratories, Waseda University、6.National Institute of Materials Science、7.Present address: Tokyo Electron Inc.)
