2007 International Conference on Solid State Devices and Materials
2007年9月18日〜9月21日Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
2007 International Conference on Solid State Devices and Materials
2007年9月18日〜9月21日Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-9-1]Practical Solutions to Enhance EWF Tunability of Ni FUSI Gates on HfO2
X.P. Wang、J.J. Yang、H.Y. Yu、M.-F. Li、J.D. Chen、R.L. Xie、C.X. Zhu、A.Y. Du、P.C. Lim、Andy Lim、Y.Y. Mi、Doreen M.Y. Lai、W.Y. Loh、S. Biesemans、G.Q. Lo、D.-L. Kwong(1.SNDL, ECE Dept, National University of Singapore、2.Institute of Microelectronics、3.IMEC、4.Dept. of Microelectronics, Fudan University、5.Institute of Material Research and Engineering)
