[B-3-3]Gate-All-Around 4-nm Silicon Nanowire Schottky Barrier MOSFET with 1-D NiSi Source/Drain
J. W. Peng1,2,3、S. J. Lee2、G. C. Albert Liang2、N. Singh1、C. M. Ng3、G. Q. Lo1、D. L. Kwong1(1.Inst. of Microelectronics、2.National Univ. of Singapore、3.Chartered Semiconductor Manufacturing Ltd., Singapore)
