2012 International Conference on Solid State Devices and Materials

2012 International Conference on Solid State Devices and Materials

2012年9月25日〜9月27日Kyoto International Conference Center, Kyoto, Japan
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International Conference on Solid State Devices and Materials
2012 International Conference on Solid State Devices and Materials

2012 International Conference on Solid State Devices and Materials

2012年9月25日〜9月27日Kyoto International Conference Center, Kyoto, Japan

[A-2-2]Low-loss Si waveguides with Variable-Shaped-Beam EB Lithography for Large-scaled Photonic Circuits

N. Hirayama1,2、H. Takahashi1,3、Y. Noguchi1,2、M. Yamagishi1,2、T. Horikawa1,2(1.Inst. for Photonics-Electronics Convergence System Tech.、2.National Inst.of Advanced Industrial Science and Tech.、3.Photonics Electronics Tech. Res. Association , Japan)
https://doi.org/10.7567/SSDM.2012.A-2-2
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