2019 International Conference on Solid State Devices and Materials
2019年9月2日〜9月5日Nagoya University
2019 International Conference on Solid State Devices and Materials
2019年9月2日〜9月5日Nagoya University
[B-2-03]Double heterojunction Si-Ge-Si pin waveguide photodiodes for high-speed communications at 1550nm wavelength
○L. Virot1, D. Benedikovic2, G. Aubin2, J.-M. Hartmann1, B. Szelag1, F. Amar2, X. Le Roux2, C. Alonso-Ramos2, P. Crozat2, D. Marris-Morini2, E. Cassan2, C. Baudot3, F. Boeuf3, J.M. Fédéli1, C. Kopp1, L. Vivien2(1.Univ. Grenoble Alpes and CEA, LETI (France), 2.Centre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris-Saclay (France), 3.STMicroelectronics, Silicon Technology Development (France))
